AGS
Plasma Systems, Inc. 
Transforming Technology into Affordable
Solutions
MPS
Series - Plasma Etching & Deposition Platform
High performance, plasma tool used in a
variety of demanding applications
The
new Modular Process System offers the ultimate machine for
thin film research and development.
Advanced Reactor technologies, such as HDP, RIE, PECVD, RIE/PE, and PVD are available as standard modules.
Manual load or a variety of vacuum load locks are available.
The MPS series is available as an OEM module to integrate to existing system platforms.
MPS Series - Features
•
Modular Design for Ease of Maintenance
• Single or Dual Chamber
• Batch or Single Substrate
• Small Foot Print
• Stainless Steel or Aluminum Process Chambers
• Cost Effective Process Solution
• Automatic Process Controller using Windows®
Extraordinary capability -
Excellent value
"A whole new plasma system"
For more information:
Contact us directly at:
AGS Plasma Systems, Inc.
San Jose, CA 95134
TEL
Please send your questions, comments, or suggestions to the AGS Sales desk
or, Submit a Literature Request
Copyright 1991-2007 AGS Plasma - All Rights Reserved
System 1700/900, Visor, LCE Series, APC-2000, & PlasmOps are trademarks of
AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications are subject to change without notice.
Last update made on: 2/20/07 by Webmaster