Daily                Date:____________                By:______________________

__  Check
subsystems

__  Wipe
off load chamber seal with a lint free wipe moistened with IPA

__  Run O2
Clean & Seasoning process as required

Weekly            Date:____________                By:______________________

__  Check
subsystems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Wipe
down load chamber with DI/IPA moistened wipe

__  Run O2
Clean & Seasoning process as required

__  Backup
system controller user files

Bi-Weekly        Date:____________                By:______________________

__  Check
subsystems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Record
Base pressure: ___________ Torr @5mins, & Leak Rate: _______ mT/Min

__  Wipe
down load chamber with DI/IPA moistened wipe

__  Run O2
Clean & Seasoning process as required

Monthly            Date:____________                By:______________________

__  Remove
gas diffuser from upper electrode and clean with DI/IPA moistened wipe

__  Wipe
down chamber and electrodes with DI/IPA moistened wipe

__  Check/tighten
load arm bearings

__  Wipe
down load chamber with DI/IPA moistened wipe

__  Check
subsystems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Check
for coolant and oil leaks

__  Check
chiller setpoints vs. actual

__  Reset
system controller

__  Regenerate
cryo pump (if installed)

__  Record
Base pressure: ___________ Torr @5mins, & Leak Rate: _______ mT/Min

STD
PLASMA=               %
,                mT@          %,
Wf
Wr
Vdc

Quarterly          Date:____________                By:______________________

__  Remove
gas diffuser from upper electrode and clean with DI/IPA moistened wipe

__  Wipe
down chamber and electrodes with DI/IPA moistened wipe

__  Wipe
down load chamber with DI/IPA moistened wipe

__  Check/tighten
lid hinge

__  Check/adjust
lifter assembly

__  Check
subsystems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Check
for coolant and oil leaks

__  Check
chiller setpoints vs. actual

__  Reset
system controller and archive files

__  Record
Base pressure: ___________ Torr @5mins, & Leak Rate: _______ mT/Min

STD
PLASMA=               %
,                mT@          %,
Wf
Wr
Vdc

6 Months          Date:____________                By:______________________

__  Remove
gas diffuser from upper electrode and clean

__  Remove,
clean, and reinstall electrodes

__  Replace
chamber orings and seals

__  Wipe
down chamber and electrodes with DI/IPA moistened wipe

__  Wipe
down load chamber with DI/IPA moistened wipe

__  Check lid/chamber
alignment

__  Check/adjust
lifter assembly

__  Inspect/adjust
RF components and replace as required

__  Check
subsystems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Check
for coolant and oil leaks

__  Check
chiller setpoints vs. actual

__  Change
Turbo oil and chiller coolant

__  Check/adjust/calibrate
DC power supplies & analog I/O

__  Reset
system controller and archive files

__  Record
Base pressure: ___________ Torr @5mins, & Leak Rate: _______ mT/Min

STD
PLASMA=               %
,                mT@          %,
Wf
Wr
Vdc

12 Months        Date:____________                By:______________________

__  Remove,
disassemble, clean and rebuild chamber and electrodes

__  Replace
chamber and insulator orings and seals

__  Wipe
down chamber and electrodes with DI/IPA moistened wipe

__  Replace
load chamber bearings, orings and seals

__  Wipe down
load chamber with DI/IPA moistened wipe

__  Inspect/adjust
RF components and replace as required

__  Check
subsytems and facilities

__  Check
MFC and Manometer zero and adjust as required

__  Check
for coolant and oil leaks

__  Check
chiller setpoints vs. actual

__  Change
Turbo oil and chiller coolant

__  Check/adjust/calibrate
DC power supplies & analog I/O

__  Reset
system controller and archive files

__  Record
Base pressure: ___________ Torr @5mins, & Leak Rate: _______ mT/Min

STD
PLASMA=               %
,                mT@          %,
Wf
Wr
Vdc