AGS
Plasma Systems, Inc. 
MPS-200L - LoadLock
Batch Loadlock
Advanced systems for use with toxic or corrosive gases or when contamination must be eliminated from your process.
MPS-200L Features
Whether
your requirement is a sensitive etch process or a critical passivation
deposition, the MPS-200 LoadLock gives you the
safest, pristine environment to perform all your critical dry processes in. Our unique MagCouple transfer
robot offers the most trouble-free shuttle system on the market today. You
simply load and press run and your substrates are processed
fully automatically - with reliability and uptime all the competition is
envious of.
- Available with Plasma etch, RIE, PECVD, and with ECR sources
- Excellent for corrosive or hazardous chemistries
- Safely reduces particulate contamination
- Etch metal, poly, Si trench, refractory silicides, III-V features, GaAs backside vias, or Deposit ILD's
- Will process any size or shape substrate up to 300mm
- Eliminates water vapor and other contaminants
- Exclusive MagCouple(tm) loading robot - simple reliable operation and self-aligning
- Increase your throughput with quick pump downs
Realize your process objectives from initial design requirement right into production with the most reliable loadlock system you can buy.
MPS-200L Delivery
Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are included with the system
Service: 1 year of quarterly PM's can be included with each system
Extraordinary capability -
Excellent value
"A whole new plasma system"
For more information:
Please send your questions, comments, or suggestions to the AGS Sales desk
Copyright 1991-2008 AGS Plasma - All Rights Reserved
System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 6 September, 2008 by Webmaster