AGS
Plasma Systems, Inc. 
MPS-200- RIE
Reactive
Ion Etcher
The classic, high performance, value priced, RIE plasma tool used throughout the world for over ten years - and still going strong!
MPS-RIE Features
This system is your best bet when you have a variety of demanding
applications.
The MPS-RIE is great for day-to-day use at the push of a button.
- Best built R&D or low volume production tool available
- SiO2, SiNx, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, HTSC's, and for failure analysis
- Accepts any size substrate from 1" to 12" wafers, flat panels, or custom packages
- Easy to use and simple to service
- Safe, rugged design means high reliability with remarkable uptime
- Simple 5 piece chamber construction is versatile and easy to upgrade
- Multi-use process kit with virtually no process memory effect
MPS-RIE Delivery
Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are included with the system
Service: 1 year of quarterly PM's can be included with any system
Extraordinary capability -
Excellent value
"A whole new plasma system"
For more information:
Please send your questions, comments, or suggestions to the AGS Sales desk
Copyright 1991-2008 AGS Plasma - All Rights Reserved
System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 6 September, 2008 by Webmaster