AGS Plasma Systems, Inc.

Frequently Asked Questions

To help our Semi-Group/IPE/PME/1700 users, we provide quick service notes to give you important information about how to maximize uptime on your system.

For answers to some common questions, click here to jump to that topic:

Frequently Asked Questions Index

• Main Power or electrical
• System Controller
• Vacuum subsystems
• Gas subsystems
• RF sources
• Process Chamber
• Process Questions
• Miscellaneous Questions

Main Power or electrical

• Q: Main power is on but the RF power supply doesn't work. What should I check?
  A: Check the door interlocks and look for a circuit breaker on the back on the RF power supply unit.

  Q: I just installed a new mechanical pump but the system won't pump down. What can cause this
  A: Check for correct rotation on pump. 3 phase pumps are phase sensitive. You may need to reverse two of the phase wires then check at pump inlet for actual vacuum. Also, you may have a leak at one of the KF fittings

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System Controller

• Q: How do I abort a PC5000 process?
  A: Press the "Stop" button and wait until the alarm rings at least 5 times. The process will advance to step 9 which completes the run and activates the super-purge routine.

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Vacuum subsystems

• Q: My system seems to take longer and longer to pump down. What's wrong?
  A: The system probably just needs to be wet cleaned. But, it may need a thorough preventive maintenance service.

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Gas subsystems

• Q: My gas flow is very unstable. What can be the cause of this?
  A: Usually, this is a problem with either the MFC or your regulators. See also: MFC trouble guide

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RF sources

• Q: I have no plasma. My RF power supply shows high reflected power. What is wrong?
  A: It could be many things. See if you get improvement by manually tuning the matching network. Check to see if you can run the standard test plasma. Finally, Check your RF cable connections.

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Process Chamber

• Q: I hear a "clunking" noise when I raise the chamber and it won't go all the way up. What is it?
  A: Sounds like you hoist chain may be slipping. Try to increase the chain tension. We also have a chain idler retrofit available for older Semi-Group/IPE systems.

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Process Questions

• Q: I did a wet clean and now my etch rate is down (or up) from normal. How do I fix this?
  A: This is common. It is most likely due to the chamber walls being so clean that "normal" process residues have not recoated the chamber. This affects the chemistry and impedance of the process chamber and can affect etch rates. Try to run a load of test samples using your standard process. After a period of time, your process should stabilize.

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Miscellaneous Questions

• Q: What kind of routine maintenance should I do?
  A: Generally these are the most trouble free plasma systems available in the world today. Regular wet cleans are a good idea. Institute a checklist of daily, weekly, monthly, and quarterly checks. We recommend an annual clean and rebuild PM as a minimum level of maintenance to insure reliable usage. Some frequent users perform the PM on a semi-annual basis as well. You should have a supply of consumables always on hand to respond quickly to maintenance concerns.

  Q: I really need to get answers right away. What is the best way to get tech support?
  A: AGS offers a "Gold" level of support services with engineer's that can be standing by to answer your urgent requests for help. See also: Gold Support Services

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System 1700, 1700 Research Locus, APC-1000, & PlasmOps are trademarks of AGS Plasma.
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Last update made on: 6 September, 2002 by Webmaster